The Investigation of High-Temperature SAW Oxygen Sensor Based on ZnO Films
نویسندگان
چکیده
منابع مشابه
High Temperature SAW Gas Sensor on Langasite
Novel Surface Acoustic Wave (SAW) devices using the new langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750°C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology and were mounted in a high temperature sealed stainless steel chamber for gas testing. The high temperature SAW sen...
متن کاملHigh temperature LGS SAW gas sensor
Novel surface acoustic wave (SAW) devices using the recent langasite (LGS) family of crystals have been designed, fabricated, and tested for high temperature (up to 750 ◦C) gas sensor applications. The devices were fabricated using platinum (Pt) and palladium (Pd) thin film technology as electrodes and sensing films to withstand temperatures in excess of 1000 ◦C. Combinations of platinum and pl...
متن کاملNovel AlN/Pt/ZnO Electrode for High Temperature SAW Sensors
In order to develop a film electrode for the surface acoustic wave (SAW) devices working in high temperature, harsh environments, novel AlN/Pt/ZnO multilayers were prepared using pulsed laser deposition (PLD) systems on langasite (LGS) substrates. The AlN film was used as a protective layer and the ZnO buffer layer was introduced to improve the crystal quality of Pt films. The results show that...
متن کاملinvestigation of effective parameters on the rigidity of light composite diaphragms (psscb) by fem
در این رساله با معرفی سقف های psscb متشکل از ترکیب ورق های فولادی ذوزنقه ای و تخته های سیمانی الیافی به عنوان سقف های پیش ساخته (سازگار با سیستم سازه ای قاب های فولادی سبک) به بررسی پارامترهای موثر بر صلبیت سقف، پرداخته می شود. در تحقیق حاضر ابتدا به مدل سازی دو نمونه سقف آزمایش شده، به روش اجزاء محدود با استفاده از نرم افزار تحلیلی abaqus ver 6.10 پرداخته شده است. نمونه های ساخته شده تحت اعما...
High-Temperature SAW Wireless Strain Sensor with Langasite
Two Surface acoustic wave (SAW) resonators were fabricated on langasite substrates with Euler angle of (0°, 138.5°, 117°) and (0°, 138.5°, 27°). A dipole antenna was bonded to the prepared SAW resonator to form a wireless sensor. The characteristics of the SAW sensors were measured by wireless frequency domain interrogation methods from 20 °C to 600 °C. Different temperature behaviors of the se...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Materials
سال: 2019
ISSN: 1996-1944
DOI: 10.3390/ma12081235